Well as a telecom engineer who designs cell tower grounding systems I have never heard of such a requirement to get down to .5 ohms and see no point in it. As a ex Substation engineer we never went spec'd lower than 3 ohms in a massive 750 KV substation, although they usually were 1 ohm or less after being built.
Personally i don't think it is possible or at least feasible to get to .5 ohms. Sure the spec doesn't say 5 ohm's?
At any rate there are a number of ways to get the impedance down by using chemical ground rods like those made by XIT, in conjunction with using bentonite clay, radials, and ground mats.
I concur with Brian you should sub-contract the work to companies that specialize in grounding applications like XIT. But .5 ohm's good luck.
To be honest with you most of these specs are designed to do one thing and one thing only. Force the contractor to have a planned grounding protection system to serve a specific purpose like lightning protection and take discretion out of the EC hands by driving two rods in the ground and calling it a day.
I will give you a tip though. I don’t shoot for specific impedance. I use a cookie cutter design for all sites and it starts by using the towers concrete peers and rebar, then install an XIT rod at each leg of the tower, build a ring around the tower and equipment shelter, radial out from the tower and shelter to the fence line, and another XIT rod at the hatch entry port of the shelter on the ring line surrounding the shelter. Impedance is whatever it is, as long as the design I made is installed properly I could care less what the impedance is. I have a couple of other things I do, but that is a trade secret.