517.13 (A) only applies to branch circuits. But some of your linear accelerator wiring could probably be considered as "branch circuits".
And I would definately suggest ground wires with feeders and branch or "supply" circuits.
But probably not for the control wiring.
The vendor should provide detailed installation instructions. If you follow those, you shouldn't have any problems.
BTW, "x-ray" isn't really the right term. Definately don't try to apply the x-ray demand factors to the feeders and branch circuits.